• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
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    • 专利摘要:
    The invention relates to an optical device (100) comprising: - a deformable membrane (1), - a support (2) to which a peripheral anchoring zone (1c) of said membrane (1) is bonded, - a cavity filled with a constant volume of a fluid (3), said cavity being delimited by the membrane (1), a bottom (20, 200) extending substantially parallel to the membrane (1) and a wall (21) of the support ( 2) extending between the bottom (20) and the membrane (1), - a device (4) for actuating an area (1a) of the membrane (1) situated between the peripheral anchoring zone (1c ) and a central portion (1b) of the diaphragm (1), configured to flex by applying an actuating electrical voltage to move a portion of the fluid volume in a region, referred to as a flow region (30). ), located between the operating zone of the membrane (1) and the bottom (20) of the cavity, said optical device (100) being characterized in that it comprises an element heating member (5) adapted to heat at least the fluid in the flow region (30).
    公开号:FR3018927A1
    申请号:FR1452342
    申请日:2014-03-20
    公开日:2015-09-25
    发明作者:Sebastien Bolis
    申请人:WAVELENS；
    IPC主号:
    专利说明:

    [0001] FIELD OF THE INVENTION The present invention relates to an optical device as well as a method for reducing the response time of such a device.
    [0002] BACKGROUND OF THE INVENTION It is known to form an optical device by enclosing a constant volume of a fluid between a deformable membrane and a support having a face extending substantially parallel to the membrane.
    [0003] A peripheral anchor zone of the membrane is bonded to the support. The central part constitutes the optical field of the device. A device for actuating the membrane is arranged in an area of the membrane, called the operating zone, located between the peripheral anchoring zone and the central part.
    [0004] Said actuating device comprises one or more actuators able to bend towards the fluid and / or in the opposite direction to the fluid under the application of an electrical operating voltage. Deflection of the actuator causes a change in the thickness of fluid between the membrane and the face of the support opposite to the diaphragm, resulting in the flow of fluid volume in that region either toward the center of the device or towards the periphery of the device. The portion of the volume of fluid located between the operating zone of the membrane and the face of the support opposite to the membrane is called a "flow region". The flow of the fluid volume has the effect of modifying the fluid pressure to which is subjected the central portion of the membrane, which results in a deformation of said central portion, thus changing the focal length of the device. The response time of such an optical device is defined as being the interval between the instant at which an actuating electrical voltage is applied to the actuating device in order to obtain a determined focal length and the instant at which one obtains actually the desired focal length. This response time is related to the ability of the fluid to flow from the flow region to the central portion of the device or vice versa. To increase the performance of the device, it is generally sought to reduce this response time.
    [0005] Document FR 2 965 068 describes a particular arrangement of the optical device making it possible to reduce the response time. This arrangement comprises a structure delimiting, in the cavity defined by the membrane and the support, a main chamber at the central part of the membrane and a peripheral chamber at the level of the flow region. Said chambers are in fluid communication at said structure. The geometry of the device is adapted to force the flow of fluid through said structure from the main chamber to the peripheral chamber or vice versa while limiting the amount of fluid in the device.
    [0006] There remains however a need to further improve the response time of this type of optical device. BRIEF DESCRIPTION OF THE INVENTION An object of the invention is therefore to design an optical device having a reduced response time. According to the invention, there is provided an optical device comprising: - a deformable membrane, - a support to which a peripheral anchor zone of said membrane is bonded, - a cavity filled with a constant volume of a fluid, said cavity being delimited by the membrane, a bottom extending substantially parallel to the membrane and a wall of the support extending between the bottom and the membrane, - a device for actuating an area of the membrane located between the a peripheral anchor and a central portion of the diaphragm configured to flex by applying an actuating electrical voltage to move a portion of the fluid volume in a region, referred to as a flow region, located between the actuation of the membrane and the bottom of the cavity, said optical device being characterized in that it comprises a heating element adapted to heat at least the fluid located in the region of flow ement. According to one embodiment, the bottom of the cavity is a wall of the support.
    [0007] According to one embodiment, the heating element is arranged on the bottom of the cavity. A thermal insulation element may be interposed between the heating element and the bottom of the cavity. Advantageously, the heating element is arranged on a bottom region vis-à-vis the flow region. According to one embodiment, the device comprises a thermal insulation element between the heating element and the support. According to one embodiment of the invention, the bottom of the cavity comprises an additional deformable membrane.
    [0008] According to one embodiment, the heating element is arranged in the cavity, in contact with the fluid. According to one embodiment, the heating element is arranged on or under the operating zone of the membrane.
    [0009] According to one embodiment, the heating element is part of the device for actuating the membrane. Thus, if the device for actuating the membrane is a piezoelectric device comprising a stack of a piezoelectric layer and at least two electrodes arranged on either side of the piezoelectric layer and at least one of said electrodes constitutes the heating element. According to one embodiment, the heating element has an annular shape facing the operating zone of the membrane. According to one embodiment, the heating element is arranged on the wall of the cavity extending between the bottom and the membrane. According to one embodiment, the heating element is transparent to at least one wavelength of the visible range. According to one embodiment, the heating element further comprises a heat diffusion element extending between the fluid and the heating element, said heat diffusion element having a larger surface area than that of the heating element. According to one embodiment, the device comprises a thermal insulation element between the heating element and the membrane. According to one embodiment, the heating element comprises a heating resistor comprising two connection terminals, the optical device further comprising a control system connected between the terminals of said resistor for passing an electric current through the resistor. Advantageously, the device comprises a temperature sensor and the control system is configured to pass an electric current through the heating resistor when the temperature measured by said sensor is below a threshold. According to one embodiment, the control system is configured to pass an electric current through the heating resistor as soon as one of the following conditions is fulfilled: the membrane actuation device is activated, the control system receives a device start signal or the response of the optical device is not in accordance with the expected response. Optionally, the control system is configured to stop circulating an electric current through the heating resistor after a determined period of time. Another object of the invention relates to a shooting device comprising at least one optical device as described above. Another object of the invention relates to a method for reducing the response time of an optical device comprising: a deformable membrane, a support to which a peripheral anchoring zone of said membrane is bonded, a cavity filled with a constant volume of a fluid, said cavity being delimited by the membrane, a bottom extending substantially parallel to the membrane and a wall of the support extending between the bottom and the membrane, - an actuating device of a zone of the membrane located between the peripheral anchoring zone and a central part of the membrane, configured to flex by application of an electrical operating voltage so as to displace a part of the volume of fluid located in a region, called region of flow, located between the operating zone of the membrane and a face of the support opposite to said membrane, said method being characterized in that it comprises heating the fluid at least in the s the flow region so as to decrease the viscosity of said fluid. According to one embodiment, said method comprises measuring a temperature in the environment of said optical device and the heating is implemented when said temperature is below a threshold.
    [0010] According to one embodiment, the heating is implemented as soon as the actuating device is activated. Optionally, the heating ceases after a determined period. According to one embodiment, the heating is carried out impulse. According to one embodiment, the device for actuating the membrane is a piezoelectric device comprising a stack of a piezoelectric layer and at least two electrodes arranged on either side of the piezoelectric layer and the heating is carried out in passing an electric current through said electrodes. Advantageously, a potential difference (Vs2-Vs1, Vi2-Vil) is applied across the terminals of each electrode so that the difference (U) between the potential of the two electrodes is constant on the surface of the piezoelectric layer. BRIEF DESCRIPTION OF THE DRAWINGS Other features and advantages of the invention will emerge from the detailed description which follows, with reference to the appended drawings in which: FIG. 1 is a sectional view of an optical device according to one embodiment; wherein the heating element is arranged on substantially the entire bottom surface of the cavity containing the fluid; - Figure 2 is a sectional view of an optical device according to an embodiment in which the heating element has a shape; annular and is arranged on a region of the bottom of the cavity vis-à-vis the flow region, - Figure 3 is a sectional view of an optical device according to a variant of Figure 2, - the figure 4 is a sectional view of an optical device according to an embodiment in which the heating element is arranged in the zone of actuation of the membrane, on the face in contact with the fluid in the flow region; l FIG. 5 is a sectional view of an optical device according to a variant of FIG. 4 in which the heating element is arranged in the zone of actuation of the membrane, on the face opposite to the fluid, FIG. a sectional view of an optical device in which the heating element is arranged on a wall of the cavity extending between the bottom and the diaphragm, - Figure 7 is a sectional view of an optical device according to a method. embodiment in which the heating element is part of the diaphragm actuating device; - Fig. 8 is a sectional view of an optical device according to an embodiment in which a heat diffusion element extends between the fluid and the heating element; FIG. 9 is a sectional view of an optical device according to an embodiment in which the heating element is arranged on a face of the support opposite to the bottom of the cavity, FIG. 10 is a sectional view of a device optical device according to one embodiment in which the heating element is arranged on a part of the support extending beyond the anchoring zone of the membrane, - Figure 11 is a sectional view of an optical device according to an embodiment in which a thermal insulation element is arranged between the heating element and the support; - FIG. 12 is a curve illustrating the power P (in mVV) as a function of the depth p (in mm) of the FIG. 13B is a diagram of the heating element consisting of a heating resistor extending over a solid surface, FIG. 13B is a diagram of the heating element consisting of a heating resistor. FIG. 14A and 14B illustrate two examples of arrangement of a serpentine heating resistor on a rectangular surface, FIGS. 15A and 15B illustrate two examples of arrangement of a heating resistor in the form of a coil.16A and 16B illustrate two examples of arrangement of a serpentine heating resistor on an annular surface; FIG. 17 illustrates an example of arrangement of a heating resistor in the shape of a coil. serpentine on a rectangular surface recessed at its center, - Figure 18 illustrates an example of a heating resistor extending continuously on an annular surface, - Figure 19 is a sectional view of an optical device according to an embodiment. wherein the heating element is integrated with the membrane actuator; - Fig. 20 is an exploded schematic view of a conventional piezoelectric actuator; - Fig. 21 is an exploded schematic view of a device piezoelectric actuator whose electrodes are heating resistors; FIG. 22 shows the distribution of the potential difference applied between the The electrodes of a conventional piezoelectric actuator along the length of the actuation zone, FIG. 23, show the distribution of the potential difference applied between the electrodes of a piezoelectric actuator device of the type of 21 when the heating element is not activated, FIG. 24 shows the distribution of the potential difference applied between the electrodes of a piezoelectric actuator of the type shown in FIG. heating element is activated; - FIG. 25 illustrates an embodiment of the optical device comprising two deformable membranes coupled by the volume of fluid; FIG. 26 illustrates a variant of the embodiment of FIG. 25 in which an intermediate support is interposed in part between the two membranes, - Figure 27 illustrates an embodiment of the optical device comprising two membranes are deformable each associated with a separate volume of fluid. For reasons of legibility of the figures, the various elements illustrated are not necessarily represented on the same scale. The reference signs are used from one figure to another to designate the same elements. DETAILED DESCRIPTION OF EMBODIMENTS OF THE INVENTION The optical device generally comprises a cavity filled with a constant volume of a fluid, said cavity being delimited: on the one hand by a deformable membrane; on the other hand, by a bottom extending substantially parallel to the membrane, - finally, by a wall of the support to which a peripheral anchor zone of the membrane is bonded, said wall extending between the bottom and said membrane deformable. The membrane comprises a central portion which corresponds to an optical field of the optical device.
    [0011] The membrane thus comprises a face, said inner face, which is in contact with the fluid, and an opposite face, said outer face, which is in contact with a second fluid, which may be ambient air. By membrane is meant any flexible and waterproof film, so that the membrane forms a barrier between the fluid contained in the cavity and the fluid on the opposite side of the membrane. In the case where the optical device is a lens, which thus functions in transmission, the membrane and the bottom of the cavity are transparent, at least in their central part, to an optical beam intended to propagate through the lens, crossing successively the central part of the membrane, the fluid and the bottom of the cavity. In the case where the optical device is a mirror, the central part of the membrane and / or the bottom is reflective. The fluid is sufficiently incompressible to move towards the central part of the device when a force is applied to a membrane in the direction of the fluid, this force being applied in an intermediate portion between the anchoring zone and the central part of the membrane. The membrane is able to deform reversibly, from a rest position (which may be plane or not), under the action of such displacement of the fluid, which varies the thickness of fluid at the level of the central part of each membrane. The shape of the support and the membrane may advantageously have a shape of revolution around the optical axis of the optical device, but the skilled person may choose any other form without departing from the scope of the present invention.
    [0012] The membrane is provided with a device for actuating an area located between the peripheral anchoring zone and the central part. Said actuator is configured to flex by applying an actuating electrical voltage to move a portion of the fluid volume located in a region, referred to as a flow region, located between the operating zone of the diaphragm and the bottom of the cavity. Those skilled in the art know different actuating devices that can be used to actuate membranes. These devices are based on various technologies, among which include piezoelectric actuation, electrostatic actuation, electromagnetic, thermal or based on electro-active polymers. In this regard, reference can be made to a detailed description of such actuating devices in the documents FR2919073, FR2950154 and FR2950153.
    [0013] The choice of actuation technology and the dimensioning of the actuating device depends on the expected performance (for example the power consumption), the stresses to which it will be subjected during the operation of the device, as well as the considerations relating to the electrical voltage of the device. actuation to be applied. For example, an actuating device particularly suitable for obtaining a single direction of operation is based on piezoelectric technology. It will be recalled that a piezoelectric actuator comprises a block of piezoelectric material totally or partially sandwiched between two electrodes intended, when energized, to apply an electric field to the piezoelectric material. This electric field is used to control a mechanical deformation of the block of piezoelectric material. The block of piezoelectric material may be monolayer or multilayer and extend beyond an electrode. The actuating device may comprise a single actuator in the form of a ring or of several distinct actuators (for example in the form of beams) regularly distributed over the circumference of the membrane. Optionally, the actuators may be able to flex in two opposite directions. The actuating device can be arranged on the inner face of the membrane, on the outer face or inside the membrane. Optionally, the actuating device may extend in part over the peripheral anchoring zone. In some embodiments, the bottom is a wall of the support and is therefore, unlike the membrane, substantially indeformable under the action of a displacement of fluid in the cavity and the resulting change in fluid pressure. In other embodiments, the bottom of the cavity comprises a second deformable membrane, which may have physical, mechanical and dimensional properties identical to or different from that of the membrane mentioned above. In this case, the fluid provides a mechanical coupling of the two membranes.
    [0014] Furthermore, said optical device comprises a heating element adapted to heat at least the fluid located in the flow region. The heating of the fluid makes it possible to reduce its viscosity at least in said flow region and thus promote the flow of fluid to the central portion or to the periphery of the cavity, according to the direction of deflection of the actuating device. The response time of the optical device is then reduced. The heating element advantageously comprises an ohmic conductor (commonly called "resistor") in which an electric current is passed.
    [0015] The ohmic conductor is coupled to a control system which controls the intensity of the electric current flowing in the ohmic conductor or the electrical voltage across its terminals. By Joule effect, an increase in the temperature of said conductor is obtained and a power P dissipated in the form of heat corresponding to the formula: U2 where U is the voltage (in volts) applied across the conductor and R is the value of the resistance (in ohms) of said conductor. The thermal energy provided by the Joule effect during a time At is: U2 E = -x At R The equations above correspond to a control of the electric voltage U applied to the terminals of the conductor. In the case where it is the electric current I which is controlled by the control system, the power P is expressed: P = R x 12 where I is the electric current (in amperes) flowing in the conductor. The thermal energy provided by Joule effect for a time At is: = R x 12 x At The ohmic conductor can be integrated into the optical device according to different embodiments which are described in detail below. The ohmic conductor performance depends on the material or materials that constitute it and its geometry. In general, it will seek to optimize the materials and geometry of the ohmic conductor to provide rapid heating of the fluid while minimizing the power consumption of the optical device. Alternatively, a Peltier module may be used in place of the ohmic conductor mentioned above to form the heating element. Preferably, the heating element is positioned as close as possible to the fluid - for example in direct contact with the fluid, and has a surface large enough to provide a heat exchange surface with the largest fluid possible. In the case where the response time of the optical device is satisfactory at ambient temperature, the activation of the heating element can take place only at low temperature, when this temperature causes a significant decrease in the viscosity of the fluid and by therefore a decrease in the response time of the device. Thus, below a determined temperature threshold from which the response time of the device is no longer acceptable, the control system is engaged to heat the fluid and reduce the response time to an acceptable level. This control mode is advantageous in that it minimizes the power consumed by the optical device. It is indeed only at low temperature that the heating element contributes to the power consumption of the optical device. Alternatively, especially when the response time of the optical device is deemed insufficient at room temperature, the activation of the heating element can be systematic. In this case, the fluid is heated regardless of the temperature to which the optical device is subjected, which makes it possible to reduce the viscosity of the fluid and to improve the response time. The duration of the heating may depend on the use of the device.
    [0016] The activation of the heating element can be carried out in a pulsating manner, with each actuation of the membrane. During the target response time (typically of the order of 10 ms or even a few ms), the fluid is heated to facilitate its flow, then the heating stops as long as the device is inactive until the next actuation. In the case where the heating element must be activated below a certain temperature threshold, there are several solutions to detect the need to activate it: - the temperature can be measured by a sensor which can be an ohmic conductor dedicated to this measurement in the optical device or a temperature sensor located outside the optical device; the temperature can be measured by the heating element itself by a technique known to those skilled in the art (the so-called four-point method); a characteristic of the optical device can be measured at rest (without actuation), if said characteristic (for example the focal length, the electric current at the terminals of the actuating device) is influenced by the temperature, a characteristic (for example the focal length ) of the optical device can be measured after a certain actuation time and compared to an expected value: if the measured focal length is of the order of the expected focal length, the device has a sufficiently fast response time and it is not necessary to heat the fluid. If the focal length is below a determined threshold, it means that the heating element must be activated (the intensity of the current to pass through the ohmic conductor that can be connected to the focal length to be reached). As mentioned in the preceding paragraph, this principle can be applied to another characteristic of the optical device, such as the current at the terminals of the actuating device; - Another method is to use the optical device a first time without heating (for example, leaving the focus sequence to occur) and, if the result is not at the expected level, activate the heating element. Whatever the chosen detection mode, if the heating is not continuous, the control system of the heating element operates according to a suitable algorithm. The development of this algorithm is within the reach of the skilled person.
    [0017] Figure 1 illustrates a first embodiment of the invention. The optical device 100 comprises a support 2 having a recessed shape defining a cavity comprising a bottom 20 and a side wall 21 extending from the bottom.
    [0018] The support may optionally consist of a stack of layers, so that the material of the wall 21 is not necessarily the same as that of the bottom 20. For example, the substrate 2 may be made of glass. The deformable membrane 100 has a peripheral zone 1c through which it is anchored in a sealed manner on the support 2. The membrane thus defines, with the bottom 20 and the wall 21, a sealed cavity filled with a constant volume of a fluid 3 The device 100 further comprises an actuating device (not shown) arranged in the operating zone 1a of the membrane which is located between the anchoring zone 1c and the central portion 1b of the membrane. At rest, that is to say when no electrical voltage is applied to the actuating device, the membrane 1 is assumed to be flat (configuration shown in dotted lines). Nevertheless, this illustration is not limiting and the membrane may have a non-planar configuration at rest (for example to form a convergent or divergent diopter) without departing from the scope of the present invention. The configuration of the membrane shown in solid lines corresponds to a non-limiting example of deformed configuration of the membrane under the effect of the application of an electrical voltage to the actuating device. Indeed, the application of said voltage causes a deflection of said actuator device to the fluid 3, as indicated by the two arrows. This deflection has the effect of forcing a part of the fluid located in the region 30 between the actuating zone 1a and the bottom 20 (called the flow region, which is delimited in FIG. 1 by dotted lines) to flow towards the center of the cavity. In doing so, the fluid pressure exerted on the central portion lb of the membrane increases, causing its deformation. The deformed configuration illustrated here is only a non-limiting example and it is possible to envisage other deformations of the membrane as a function of the amplitude and the direction of deflection of the actuating device. The bottom 20 of the cavity is covered with a heating element 5 which, in this embodiment, has the shape of a disk, as illustrated in plan view according to A-A. The heating element extends at least to the outer edge of the flow zone 30, so as to heat the fluid 3 in both the flow zone 30 and in the central portion of the cavity.
    [0019] In other words, the heating element in this case has the same geometry as the whole of the central portion 1b and the operating zone 1a of the membrane. In the case where the optical device operates in transmission and the heating element is in the optical field of the device, the heating element is made of one or more transparent materials at the target wavelength. For example, indium tin oxide (ITO) can be used, which is an electrically conductive material transparent in the visible range. FIG. 2 illustrates an embodiment of the device 100 in which, unlike the device illustrated in FIG. 1, the heating element 5 has an annular shape. The other characteristics of the device 100 are similar to those of the device of FIG. 1 and are therefore not described again in detail. Advantageously, the width of the heating element 5 is at least equal to the width of the actuation zone 1a of the membrane. The inner diameter of the heating element 5 is preferably chosen to be less than or equal to the inner diameter of the flow zone 30 and the outer diameter of the heating element 5 is chosen to be greater than or equal to outer diameter of the flow zone 30. It is however possible to choose a heating element which is narrower than the actuating zone, or which is partially offset relative to the actuation zone. Thus, the fluid 3 is heated locally, in the region 30 and possibly in the vicinity thereof. Locating the heating where the flow of the fluid is most critical allows to act directly on the part of the fluid whose viscosity most significantly affects the response time, especially since the fluid generally has a conductivity limited thermal. Localized heating at the region of movement of the fluid therefore avoids heating the rest of the device and gaining efficiency in terms of power required for heating the fluid. FIG. 3 illustrates a variant of the embodiment of FIG. 2, in which the heating element 5 has a rectangular outer contour and a circular inner contour. The other features of the device 100 are similar to those of the device of Figures 1 and 2 and are therefore not described again in detail. In this case, the inner edge of the heating element coincides with the periphery of the optical zone of the device, so that the heating element does not interfere with the path of the light beam, while the outer edge of rectangular shape makes it possible to increase the heat exchange surface with the fluid relative to the heating element of FIG. 2. FIG. 4 illustrates an embodiment of the optical device in which the heating element is arranged in the operating zone. of the membrane, on the face in contact with the fluid in the flow region.
    [0020] The heating element therefore has an annular geometry, as in FIG. 2. On the other hand, since the heating element is in direct contact with the fluid of the flow region, the thermal losses are minimized. FIG. 5 illustrates a variant of the optical device of FIG. 4 in which the heating element 5 is arranged in the actuation zone 1a of the membrane, on the face opposite to the fluid. FIG. 6 illustrates an embodiment of the optical device in which the heating element 5 is arranged on the wall of the cavity 21 which extends between the bottom 20 and the membrane 1. The heating element then has the geometry of a ring which extends over all or part of the height of the wall 21. Insofar as the flow region 30 is relatively close to the wall 21, the thermal conduction through the fluid can be sufficient to heat the fluid in the region 30. Furthermore, it is also conceivable that the heating element is part of the actuating device of the membrane. In the case of a piezoelectric actuation, the basic components of the device are a piezoelectric layer and two electrodes stacked on either side of said layer (see FIG. The application of a voltage between the two electrodes causes a contraction or an extension of the piezoelectric material in the plane of the layer. To obtain a deflection out of this plane, the device must comprise other components, which may be passive (such as mineral materials, for example metallic) or active (such as piezoelectric components). These various additional components affect the actuation, according to their thickness, their Young's modulus, their residual stress, their position relative to the neutral fiber of the stack. By "being part of the actuating device" is meant in the present text that the heating element can be a component which participates in the deflection and the force generated by the application of the tension on the actuation and / or a component which contributes to the mechanical equilibrium of the idle actuator (in particular a component which contributes to the control of the rest position of the actuating device) and / or a component which makes it possible to adjust the effect of the device actuation at rest on the stress in the membrane. For example, in the case of a piezoelectric actuator, the ohmic conductor forming the heating element may be an element arranged in the vicinity of the piezoelectric stack intended to balance the stresses in the stack and thus to control the position at the rest. In this case, the heating element can be positioned on the membrane, on the same face as the actuating device or on the face opposite to the actuating device.
    [0021] FIG. 7 thus illustrates an embodiment of the optical device in which the heating element 5 is positioned in the operating zone 1a of the membrane, on the face opposite to the actuating device 4. This arrangement has the advantage of electrically insulating the heating element vis-à-vis the electrodes of the actuator through the membrane. On the thermal level, it is advantageous to maximize the heat exchange surface between the heating element and the fluid. According to one embodiment of the invention illustrated in FIG. 8, the optical device comprises a heat diffusion element 6 extending between the fluid 3 and the heating element 5. The element 6 is made of a material thermally more conductive than the support 2, such as copper, silver, or DLC (Diamond Like Carbon) if considerations of optical transmission are to be taken into account. For example, the heating element 5 has an annular shape as illustrated in FIG. 2, but the heat diffusion element 6 has a larger area than the heating element. Thus, the heat dissipated by the heating element 5 is diffused within the element 6 and distributed via it to a larger surface of fluid. In the case where the optical device operates in transmission and the element 6 is in the optical field of the device, is chosen for said element 6 a transparent material to the target wavelength range. FIG. 9 illustrates an embodiment of the optical device in which the heating element 5 is arranged on a face of the support 2 opposite to the bottom 20 of the cavity, opposite the flow region 30. This solution is likely to be less effective, especially in terms of kinetics of heating, but depending on the nature of the support (for example if it is glass), the heat dissipated by the heating element 5 diffuses through the support 2 and spread over a larger area than the heating element itself. FIG. 10 illustrates another embodiment of the optical device in which the heating element 5 has an annular shape and is arranged on a substrate 23 bonded to the face of the support 2 on which the membrane 1 is anchored. Said substrate 23 is a thermally conductive material, so that the heat dissipated by the heating element 5 diffuses through the substrate 23 and the support 2 and allows the heating of the fluid at the wall 21. To heat the fluid, it may be advantageous to placing the heating element in direct contact with the fluid and isolating said heating element from the outside of the optical device.
    [0022] Depending on the thermal resistivities of the various components of the optical device, the location and geometry of the heating element can be adapted as described above. Considerations relating to the manufacture of the optical device can also be taken into account. For example, using microsystems technologies, it may be advantageous to position the heating element on the membrane to simplify its manufacture. Thus, the membrane can fulfill an electrical insulation function between the heating element and the actuating device. This avoids the addition of a specific electrically insulating layer. It may also be wise to thermally isolate the fluid from the outside, for example by including in the device one or more thermally insulating layers around the cavity containing the fluid. Similarly, it may be advantageous to include in the optical device one or more thermally insulating layers around the heating element to isolate it from the outside. FIG. 11 thus illustrates an embodiment in which a thermal insulation layer 7 is arranged on the bottom 20 between the heating element 5, which is of annular shape, and the support 2. Said layer 7 makes it possible to avoid heat losses of the heating element 5 to the outside of the optical device. The layer 7 may comprise a mineral material, such as SiO 2, SiN, Al 2 O 3 or a polymeric material. The various embodiments described above may possibly be combined by those skilled in the art depending on the configuration of the optical device and the expected performance.
    [0023] We are interested here in the dimensioning of the cavity and the heating element to obtain a performance response time. In the case of an optical device whose response time is degraded at low temperature, the main objective is to maintain the viscosity of the fluid sufficiently low at low temperatures (typically -10 or even -20 ° C.) to guarantee a time effective response compared to the ambient temperature, typically 20 ° C. To guarantee operation in response time at -10 ° C substantially equivalent to the nominal operation of the device at 20 ° C, it is necessary to heat the fluid to raise its temperature of 30 ° C. The thermal energy to be supplied to the fluid is proportional to the fluid mass m (kg), to its specific heat cs (J / kg / K) and to the desired temperature difference AT (K): E = cs x AT xm The fluid mass is defined by the volume V (m3) of fluid contained in the cavity multiplied by its density p (kg / m3). The volume of fluid is equal to the surface S of the optical device multiplied by the depth p of the cavity (assuming that the cavity is of simple shape as in FIG. 1, the height of the cavity is considered equal to the distance between the membrane 1 in its rest position and the bottom 20). We draw the relation: E = csx4Txpx5xp To minimize the energy required, we must choose a fluid with a low specific heat cs and a low density p.
    [0024] Once the fluid is chosen, the energy can be minimized by decreasing the volume of fluid in the cavity. The surface is generally defined by an optical surface (optically useful area generally corresponding to the central portion of the membrane) and a surface dedicated to the actuation (operating zone of the membrane to vary the focal length).
    [0025] This surface is a feature of the optical device, such as useful optical aperture and focal length variation. For a given optical device, the depth of the cavity can be adjusted to minimize the energy required. It is observed that the lower the cavity depth, the lower the energy required.
    [0026] FIG. 12 is a curve illustrating the power P (in mVV) for raising the fluid temperature by 30 ° C for 1s as a function of the depth p (in mm) of the cavity containing the fluid, considering a cavity of 4 mm of diameter and a fluid having the following properties: Cs = 950 J / kg / K p = 1.5 kg / m3. The calculated power corresponds to an ideal case where the fluid is perfectly isolated from the outside. Depending on the constituent materials of the device and the heat exchange conditions between the device and the outside (convection, radiation, conduction ...) and associated heat losses, the power required can be revised upwards. A more detailed calculation or even simulations (by finite elements under ANSYS for example) may be necessary. Nevertheless, the tendency of the influence of the cavity depth (fluid thickness) on the power required remains valid so that, in order to gain in efficiency and to minimize the power consumed by the heating element, it is advantageous to minimize the cavity depth.
    [0027] However, at room temperature, the cavity depth has a beneficial effect on the response time. Indeed, the greater the depth, the faster the response time. It is therefore necessary to find a compromise between a sufficiently large cavity depth to obtain a satisfactory response time of the device at ambient temperature, but not too great so as not to penalize the low-temperature power consumption required to heat the fluid and maintain a low temperature. satisfactory response time. In the above detailed example, the compromise in terms of depth is between 50 μm and 200 μm typically with a required power of 27 mVV at 107 mVV respectively. The power required to heat the fluid (and thus maintain the low temperature response time within an acceptable range) must therefore be in phase with the intended application and the actual consumption of the device in operation (associated with actuation). Once the dimensioning has been done in this way (defined fluid height / cavity depth), the person skilled in the art can design the adapted heating element. Knowing the power required, in the case of an ohmic conductor, the resistance can be determined as a function of the current or voltage that is desired to be applied. For example, if it is desired to drive the heating element with a variable voltage up to 10V, then the required minimum resistance is 3720 0 (for a cavity depth of 50 μm) and 931 0 (for a depth of 50 μm). cavity of 200 μm). The material of the heating element must be chosen for its electrical conductivity, its practicability, and possibly its transparency in the desired wavelength range (for a device operating in transmission where the heating system is also present in the useful optical zone). For example, copper is a good electrical conductor (electrical conductivity a = 5.96x107 S / m) while nickel and platinum are more resistive (respective electrical conductivity of a = 1.43x107 S / m and a = 9 , 66x106 S / m). As the materials mentioned are not transparent in the visible range, it is advantageous to place the heating element at the periphery of the optical field. Indium tin oxide (ITO) can be used as a transparent ohmic conductor in the visible range. Depending on the geometry of the optical field and the external dimension of the device, there is a certain surface area for the heating element. For example, for an optical field of diameter 2 mm and an optical device of 6 mm side, there is at most a surface of 32.9 mm 2 (case of Figure 3 by neglecting the periphery of the cavity). In the case where it is desired to limit the zone where the heating element is positioned to a crown of 4 mm in diameter for example (case of FIG. 2), the area dedicated to the heating element is then 9.4 mm 2. To optimize the performance of the heating element, it is advantageous to maximize the area occupied by the ohmic conductor in the zone where the heating element is positioned. To do this, we can cover the entire surface by an ohmic conductor (see Figure 13A), or give the ohmic conductor a coil shape (see Figure 13B). In these two figures, the marks 5a and 5b designate the terminals of the heating element 5. The rectangular dashed outline designates the surface occupied by the heating element, or heating zone. By combining the shape of the ohmic conductor of the type illustrated in FIG. 13A or FIG. 13B and the different geometries presented above, numerous technical solutions are possible. Figures 14A to 18 illustrate various examples.
    [0028] Figs. 14A-14B show two serpentine-shaped ohmic conductor patterns arranged on a rectangular or square surface; Figs. 15A-15B illustrate two serpentine-shaped ohmic conductor patterns arranged on a disk-shaped surface; Figs. 16A-16B illustrate two serpentine ohmic conductor patterns arranged on an annular surface; Fig. 17 illustrates a possible configuration of a serpentine-shaped ohmic conductor arranged on an annular surface whose inner edge is circular and the outer edge rectangular or square; Figure 18 illustrates an ohmic conductor in the form of a solid layer on an annular surface. Note that the end of the ohmic conductor positioned inside the heating zone (FIGS. 15B and 16B) can be brought back to the outside by making the ohmic conductor turn halfway inside. On the basis of a coil as shown in Fig. 13B and taking a width of resistance equal to the insulation width, the area occupied by the ohmic conductor is approximately half the area of the heating zone, respectively 16.45 mm2 (case of Figure 3) and 4.7 mm2 (case of Figure 2). Depending on the manufacturing processes used, the resistance width and the insulation width can be adjusted to increase or decrease the area occupied by the ohmic conductor. To adjust the resistance value, you can start by adjusting the resistance section. By minimizing this section, the length of the ohmic conductor required to achieve the desired value is also minimized. For example, it is possible to use a resistance of thickness e = 100 nm (standard thickness in the field of microsystems) and of width L = 50 μm (easily achievable). In this case, the corresponding area is: S = exL = 5.10-12 m2. Using the equation below which relates the resistance, the electrical conductivity of the material, its length and the section of the resistance, we can calculate the associated resistance lengths (see table below): 1 R = - 0- S Resistance (Ohm) 921 3720 Length of Cu 274.5 1108.6 Resistance (mm) Ni 65.9 266.0 Pt 44.5 179.7 Given the width retained for resistance (50pm) and surfaces available resistance (16.45mm2 in the case of Figure 3 and 4.7mm2 in the case of Figure 2), we can calculate the maximum length of the ohmic conductor can be placed in the heating zone, namely 329 mm ( case of Figure 3) and 94 mm (case of Figure 2). Given the results presented in the table above, to obtain the minimum required resistance of 3720 ° (for a cavity depth of 50 μm), it is possible to use a Ni or Pt resistor with a heating zone extended to the entire surface of the optical device except the optical field (case of Figure 3). Indeed, an ohmic conductor length of 329 mm being available in this case, one can easily place the 266 mm required for a ohmic conductor in Ni and the 179.7 mm required for an ohmic conductor in Pt. To obtain the minimum resistance Required 931 0 (for a cavity depth of 200 pm), one can use a resistance Cu, Ni or Pt with a heating zone extended to the entire surface of the device except the optical field (case of Figure 3). The heating zone can also be limited to a crown 4 mm in diameter but using a resistance Ni or Pt. Another way of proceeding, illustrated in FIG. 18, is to cover the surface available for the heating zone by an ohmic conductor in the form of a solid layer as in Figure 13A) and, given the material used for the ohmic conductor and its thickness, to calculate the associated resistance. In the case of FIG. 2, where 9.4 mm 2 is available, a crown-shaped resistor with a width of 1 mm and a thickness of 100 nm can be used. The resistances associated with this geometry are 1.58 0 for an ohmic conductor in Cu, 6,590 for Ni and 9,76 0 for Pt. These values are much lower than the resistances required to heat the liquid with a voltage of 10V ( 9310 for a cavity depth of 200pm and 37200 for a cavity depth of 50pm). Given these resistances, the liquid can be heated by adjusting the control of the heating element. An electrical voltage of 0.41V is required for Cu, 0.84V for Ni and 1.02V for Pt. In this case, the required electrical currents are greater, respectively 260mA, 127mA and 105mA. Such a case is more conducive to control of the heating element by the current rather than the voltage, the values being low. The choice between the two forms of ohmic conductor (see Figure 13A or Figure 13B) is based on the control provided for the heating element (voltage or current, intensity range) and resistance values. to reach.
    [0029] FIG. 19 illustrates a variant of the embodiment of FIG. 7 in which the heating element is totally integrated with the device for actuating the membrane. In this example, the electrodes used in the piezoelectric actuator (for example) may also serve as an ohmic conductor. In this case, up to two ohmic conductors can be integrated into the actuator without adding additional manufacturing steps. As a reminder, FIG. 20 illustrates the core of a known type of piezoelectric actuation device 4 (namely a layer of piezoelectric material 43 and the two associated electrodes 41, 42 without the possible bimorph (s). ); to simplify the scheme, this device, which has a crown shape, has been shown in linear form.
    [0030] Each of the electrodes 41, 42 is brought to an equipotential respectively noted Vs and Vi. The potential difference between the two electrodes (Vs-Vi) induces an electric field in the piezoelectric material 43 which is at the origin of the actuation. Given the geometry of the crown-shaped actuator, the corresponding ohmic conductor is shown in FIG. 16A.
    [0031] In the example illustrated in FIG. 21, the two electrodes 41, 42 fulfill the function of ohmic conductor. Each of the electrodes 41, 42 is no longer carried to an equipotential but subjected to a potential difference, respectively denoted Vs1-Vs2 and Vil-Vi2, which is intended to heat the ohmic conductor that constitutes each electrode by Joule effect. Furthermore, the potential difference between the two electrodes (Vs1-Vil and Vs2-Vi2) is intended to induce an electric field in the piezoelectric material and thus to actuate the actuating device. To ensure uniform actuation, the potential difference between the two electrodes must be uniform over the entire surface of the piezoelectric material and the actuator.
    [0032] The potential difference U between the electrodes along said electrodes is shown in FIG. 22 for an actuating device of known type; the upper electrode 41 is brought to the potential Vs and the lower electrode 42 is grounded (Vi = 0).
    [0033] FIG. 23 shows the distribution of the potential difference U between the electrodes of a piezoelectric actuator of the type of that of FIG. 21 when the heating element is not activated. In this case, the upper electrode 41 is brought to the equipotential Vs1 = Vs2 = Vs and the lower electrode 42 is grounded (Vi 1 = Vi2 = 0). FIG. 24 shows the distribution of the potential difference U between the electrodes of a piezoelectric actuator of the type of that of FIG. 21 when the heating element is activated. In this case, the upper electrode 41 is subjected to a potential difference between Vs2-Vs1 and the lower electrode 42 is subjected to a potential difference between Vi2-V1, the potential difference between the two electrodes being constant (U = Vs). If the materials of the electrodes are different, this potential difference can be ensured, for example by independently adjusting the current in the one and the other of the electrodes (in the case where the resistance values are different), or by traversing the same current value in the electrodes (in the case where the resistance values are equal by adapting their geometries). Other elements of the actuating device, such as the bimorph layer (s), for example, may play a role in connection with the heating element (for example by fulfilling the function of heat diffusion layer or the thermal insulation function of the heating element vis-à-vis the outside). Optionally, one of the two electrodes can act as a temperature sensor. The heating element and the elements which may be associated with it may furthermore provide other functions in the optical device. Thus, these elements can participate in the actuation as in the example above or allow the integration of new functions and in particular an optical function as an optical diaphragm. For example, for a device operating in transmission, the notion of diaphragm consists of using the heating element (non-transparent in the wavelengths in this case) to define the useful optical zone of the device: in this case, a heating element is typically selected as illustrated in FIGS. 2 and 3 where the passage of the incident optical beam is limited to the inside diameter. According to another example, for an optical device operating in reflection, the heating element can also ensure the reflection of the incident light: the heating element is then configured in mirror.
    [0034] In the embodiments described above, the bottom of the cavity is considered as a wall of the support, that is to say a substantially indeformable wall under the action of a displacement of fluid in the cavity and the variation of fluid pressure that results.
    [0035] However, the invention also covers an optical device in which the bottom of the cavity comprises a second deformable membrane. In this case, the fluid exerts a mechanical coupling of the two membranes, which makes it possible to modulate the deformations adopted by the central part of the two membranes.
    [0036] FIG. 25 illustrates an embodiment of the optical device 100 comprising an additional deformable membrane 200 bonded to the support 2 by an anchoring zone 200c. The deformable membrane may itself be coupled or not to an actuating device. In the embodiment illustrated in FIG. 25, the additional membrane 200 has an actuating device 205 arranged in an operating region 200a located between the anchoring zone 200c and the central portion 200b of the membrane. In this case, the heating element (not shown) is advantageously part of one and / or the other of the actuating devices 5, 205 of the two membranes. The heating element may for example have the same configuration as in the embodiment of Figure 19. In another embodiment, illustrated in Figure 26, a substrate 22 may be interposed in part between the membranes 1, 200. Said substrate 22 has a crown shape and extends radially inwardly of the cavity from the support 2. As in the previous embodiment, the additional membrane 200 is shown with an actuating device 205, but could, alternatively, not be operable. The inner diameter of the ring formed by the support is for example slightly less than the inside diameter of the actuating devices 5, 205 of the two membranes. In this case, the device comprises two flow regions: a first flow region 30 between the membrane 1 and the support 22 and a second flow region 31 between the additional membrane 200 and the support 22. In this case, it may be advantageous to arrange two heating elements 4, 204 on each side of the substrate 22 in each flow region 30, 31. Said heating elements are for example of the same type as that illustrated in FIG. 2.
    [0037] Said heating elements advantageously make it possible to take into account the geometrical differences of the flow regions associated with each membrane; for example, in the case illustrated in FIG. 26, the flow region 30 has a smaller thickness than the flow region 31. FIG. 27 illustrates an embodiment of the optical device comprising two deformable membranes 1, 200. Each of the membranes is in contact with a respective volume of fluid 3, 3 '. The two volumes are separated by an intermediate substrate 22 which extends over the entire width of the cavity and are therefore independent of one another.
    [0038] In this case, two heating elements 4, 204 are advantageously used to act on the respective flow region 30, 31. For example, the heating elements may be arranged on either side of the intermediate substrate 22, in the respective flow region.
    [0039] The optical device can be made by microelectronics techniques well known to those skilled in the art, in particular thin layer deposition techniques of the chemical vapor deposition type, physical vapor phase deposition, electrodeposition, epitaxy, thermal oxidation, evaporation film rolling. In addition, the anchoring of the membrane on the support may involve bonding techniques. The membrane may be made based on organic materials such as polydimethylsiloxane, polymethylmethacrylate, polyethylene terephthalate, polycarbonate, parylene, epoxy resins, photosensitive polymers, silicones, or inorganic materials such as silicon, silicon oxide, silicon nitride, polycrystalline silicon, diamond carbon. The membrane may consist of a single layer of the same material or a stack of layers of different materials. The fluid may be a liquid such as propylene carbonate, water, a liquid index, an optical oil or an ionic liquid, a silicone oil, an inert liquid with high thermal stability and low saturation vapor pressure. The fluid may optionally be a gas such as air, nitrogen or helium mainly for an optical device operating in reflection. If the optical device operates in transmission, those skilled in the art will choose the refractive index of the fluid according to the desired optical performance.
    [0040] REFERENCES FR 2 965 068
    权利要求:
    Claims (28)
    [0001]
    REVENDICATIONS1. An optical device (100) comprising: - a deformable membrane (1), - a support (2) to which a peripheral anchoring zone (1c) of said membrane (1) is connected, - a cavity filled with a constant volume of a fluid (3), said cavity being delimited by the membrane (1), a bottom (20, 200) extending substantially parallel to the membrane (1) and a wall (21) of the support (2) extending between the bottom (20) and the membrane (1), - a device (4) for actuating an area (1a) of the membrane (1) situated between the peripheral anchoring zone (1c) and a central part (1b) of the diaphragm (1), configured to flex by applying an actuating electrical voltage to move a portion of the fluid volume located in a region, referred to as a flow region (30), located between the operating zone of the membrane (1) and the bottom (20) of the cavity, said optical device (100) being characterized in that it comprises a heating element (5) adapted for heating at least the fluid in the flow region (30).
    [0002]
    2. Device according to claim 1, characterized in that the bottom of the cavity is a wall of the support.
    [0003]
    3. Device according to claim 2, characterized in that the heating element (5) is arranged on the bottom (20) of the cavity.
    [0004]
    4. Device according to claim 3, characterized in that a thermal insulation element is interposed between the heating element (5) and the bottom (20) of the cavity.
    [0005]
    5. Device according to one of claims 3 or 4, characterized in that the heating element (5) is arranged on a bottom region (20) vis-à-vis the flow region (30).
    [0006]
    6. Device according to one of claims 2 to 5, characterized in that it comprises a member (7) for thermal insulation between the heating element (5) and the support (2).
    [0007]
    7. Device according to claim 1, characterized in that the bottom of the cavity comprises an additional deformable membrane (200).
    [0008]
    8. Device according to one of claims 1 to 7, characterized in that the heating element is arranged in the cavity, in contact with the fluid (3).
    [0009]
    9. Device according to one of claims 1 to 8, characterized in that the heating element is arranged on or below the actuation zone (1a) of the membrane (1).
    [0010]
    10. Device according to claim 1 to 9, characterized in that the heating element is part of the actuating device (4) of the membrane.
    [0011]
    11. Device according to claim 10, characterized in that the actuating device (4) of the membrane is a piezoelectric device comprising a stack of a piezoelectric layer (43) and at least two electrodes (41, 42). arranged on either side of the piezoelectric layer and in that at least one of said electrodes (41, 42) constitutes the heating element.
    [0012]
    12. Device according to one of claims 1 to 11, characterized in that the heating element (5) has an annular shape facing the actuating zone (1a) of the membrane.
    [0013]
    13. Device according to one of claims 1 to 12, characterized in that the heating element is arranged on the wall (21) of the cavity extending between the bottom (20) and the membrane (1).
    [0014]
    14. Device according to one of claims 1 to 13, characterized in that the heating element is transparent to at least one wavelength of the visible range.
    [0015]
    15. Device according to one of claims 1 to 14, characterized in that it further comprises a heat diffusion element (6) extending between the fluid (3) and the heating element (5), said heat diffusion element (6) having a larger area than that of the heating element.
    [0016]
    16. Device according to one of claims 1 to 15, characterized in that it comprises a thermal insulation element between the heating element (5) and the membrane (1).
    [0017]
    17. Device according to one of claims 1 to 16, characterized in that the heating element comprises a heating resistor comprising two connection terminals, the optical device further comprising a control system connected between the terminals of said resistor to make pass an electric current through the resistor.
    [0018]
    18. Device according to claim 17, characterized in that it comprises a temperature sensor and in that the control system is configured to pass an electric current through the heating resistor when the temperature measured by said sensor is lower. at a threshold.
    [0019]
    19. Device according to one of claims 17 or 18, characterized in that the control system is configured to pass an electric current through the heating resistor as soon as one of the following conditions is met: the device of actuation (4) of the membrane is activated, the control system receives a start signal of the device or the response of the optical device is not in accordance with the expected response.
    [0020]
    20. Device according to claim 19, characterized in that the control system is configured to stop circulating an electric current through the heating resistor after a given period.
    [0021]
    21. Shooting device comprising at least one optical device according to one of claims 1 to 20. 25
    [0022]
    22. A method for reducing the response time of an optical device (100) comprising: - a deformable membrane (1), - a support (2) to which a peripheral anchoring zone (1c) of said membrane (1) is connected, - a cavity filled with a constant volume of a fluid (3), said cavity being delimited by the membrane (1), a bottom (20) extending substantially parallel to the membrane (1) and a wall (21) support (2) extending between the bottom (20) and the membrane (1), - a device (4) for actuating an area (1a) of the membrane (1) located between the peripheral anchor zone (1c) and a central portion (1b) of the diaphragm (1) configured to flex by applying an actuating electrical voltage to move a portion of the fluid volume located in a region said flow region (30) located between the operating zone of the membrane (1) and a face of the support (2) opposite to said membrane, said method being characterized in that it comprises heating the fluid (3) at least in the flow region (30) so as to decrease the viscosity of said fluid (3).
    [0023]
    23. The method of claim 22, characterized in that it comprises measuring a temperature in the environment of said optical device (100) and in that the heating is implemented when said temperature is below a threshold.
    [0024]
    24. Method according to one of claims 22 or 23, characterized in that it comprises the implementation of heating as soon as the actuating device (4) is activated.
    [0025]
    25. The method of claim 24, characterized in that the heating ceases after a fixed period.
    [0026]
    26. Method according to one of claims 22 to 25, characterized in that the heating is carried out in a pulse manner.
    [0027]
    27. Method according to one of claims 22 to 26, characterized in that the actuating device (4) of the membrane is a piezoelectric device comprising a stack of a piezoelectric layer (43) and at least two electrodes (41, 42) arranged on either side of the piezoelectric layer and in that the heating is carried out by passing an electric current through said electrodes.
    [0028]
    28. The method according to claim 27, characterized in that a potential difference (Vs2-Vs1, Vi2-Vil) is applied across the terminals of the electrode so that the difference (U) between the potential of the two electrodes is constant on the surface of the piezoelectric layer.
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    同族专利:
    公开号 | 公开日
    CN106170719B|2017-12-15|
    CN106170719A|2016-11-30|
    US10302897B2|2019-05-28|
    EP3120171B1|2019-09-11|
    US20170131515A1|2017-05-11|
    WO2015140294A1|2015-09-24|
    FR3018927B1|2017-09-08|
    EP3120171A1|2017-01-25|
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    法律状态:
    2016-02-08| PLFP| Fee payment|Year of fee payment: 3 |
    2017-02-13| PLFP| Fee payment|Year of fee payment: 4 |
    2017-07-14| TP| Transmission of property|Owner name: WEBSTER CAPITAL LLC, US Effective date: 20170614 |
    2018-02-22| PLFP| Fee payment|Year of fee payment: 5 |
    2020-02-14| PLFP| Fee payment|Year of fee payment: 7 |
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    2022-02-08| PLFP| Fee payment|Year of fee payment: 9 |
    优先权:
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    FR1452342A|FR3018927B1|2014-03-20|2014-03-20|DEFORMABLE MEMBRANE OPTICAL DEVICE WITH REDUCED RESPONSE TIME|FR1452342A| FR3018927B1|2014-03-20|2014-03-20|DEFORMABLE MEMBRANE OPTICAL DEVICE WITH REDUCED RESPONSE TIME|
    PCT/EP2015/055920| WO2015140294A1|2014-03-20|2015-03-20|Optical device with deformable membrane having reduced response time|
    EP15712848.9A| EP3120171B1|2014-03-20|2015-03-20|Optical device with deformable membrane having reduced response time|
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    US15/127,411| US10302897B2|2014-03-20|2015-03-20|Optical device with deformable membrane having reduced response time|
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